1. Computational lithography
Author: / Xu Ma and Gonzalo R. Arce
Library: Central Library, Center of Documentation and Supply of Scientific Resources (East Azarbaijan)
Subject: Microlithography, Mathematics,Integrated circuits, Design and construction, Mathematics,Photolithography, Mathematics,Semiconductors, Etching, Mathematics,Resolution (Optics)
Classification :
TK7872
.
M3M3
2010
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2. Computational lithography
Author: Xu Ma and Gonzalo R. Arce
Library: Center and Library of Islamic Studies in European Languages (Qom)
Subject:
Classification :
TR940
.
M3
2010
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